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521074S Microelectronics and Micromechanics, 5 ECTS cr 
Code 521074S  Validity 01.08.2015 -
Name Microelectronics and Micromechanics  Abbreviation Microelectronic 
Scope5 ECTS cr   
TypeAdvanced Studies Discipline4306 Electrical Engineering 
  Grading1 - 5, pass, fail 
Unit Electrical Engineering DP 

Krisztian Kordas 

ECTS Credits 


Language of instruction 



3rd period

Learning outcomes 

Objective: The course provides advanced knowledge on the semiconductor techniques of VLSI and on special topics of micromechanics and hybrid fabrication. Especially recent progress on the field is introduced in application point of view.

Learning outcomes: After completing the course the student can give account on correlations between basic physics/chemistry and materials processing/technology in microelectronics, micromechanics and nanotechnology. The student can describe design aspects and operation principles of micro and nano-devices. The students get acquainted with working in laboratory environment similar to those in academic and industrial research labs. Laboratory work practice on either (i) thin film fabrication in clean room, (ii) inkjet printing and electrical characterization of thin film devices with nanopartciles or (iii) synthesis of carbon nanotubes and characterization by electron microscopy techniques will provide a good opportunity also to learn how to design and run experiments safely and manage laboratory reports.


Theory and practice of VLSI semiconductor fabrication technologies to support and deepen the understanding of general fabrication and operation principles introduced during previous courses. The state-of-the-art semiconductor devices and circuits: pushing the limits of dimensions and speed. Implementation of VLSI technologies in fabrication of components for micromechanics. Sensors (flow, pressure) and actuators (valves, pumps, motors, switches and components for micro-optics) using MEMSs. Devices on the nanoscale and integration of nanomaterials in microsystems: new concepts of design, fabrication and operation.

Mode of delivery 

Lectures, laboratory exercise with supervision and guidance.

Learning activities and teaching methods 

Though the course is primarily based on lectures, the communication channel is open in both directions enabling continuous comments, questions and feedback from the students. Critical explanations and think alouds are also applied to motivate thinking and active learning.

Target group 

Students of the University of Oulu.

Prerequisites and co-requisites 

Passing the basic course “521070A Introduction to microfabrication techniques” before the advanced course is recommended.

Recommended optional programme components 


Recommended or required reading 

Lecture notes and references therein.

Assessment methods and criteria 

Examination and completion of both laboratory exercise and report.

Read more about assessment criteria at the University of Oulu webpage.


Numerical grading 1-5.

Person responsible 

Krisztian Kordas

Working life cooperation 


Other information 



Current and future instruction
Functions Name Type ECTS cr Teacher Schedule
registration period has not begun Microelectronics and Micromechanics   Course  Krisztian Kordas  11.01.22 -01.03.22

Future examinations
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