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521072S Microsensors, 5 ECTS cr 
Code 521072S  Validity 01.08.2015 -
Name Microsensors  Abbreviation MICROSENSORS 
Scope5 ECTS cr   
TypeAdvanced Studies Discipline4306 Electrical Engineering 
  Grading1 - 5, pass, fail 
Unit Electrical Engineering DP 

Jari Hannu 

ECTS Credits 

5 ECTS credits / 132,5 hours of work

Language of instruction 

English. Guidance and exams also possible in Finnish.


The course is held in the 2nd period. Teaching is available every second year. The next time course is arranged on autumn 2020.

Learning outcomes 

1. After completing the course, student can explain the basic concepts of sensor theory and technology, classification of sensors, properties of ideal and real sensors, pros and cons of integrated smart sensor systems, and the interface between sensor and pro

2. Student can explain the main fabrication methods, including thin-film technologies, micromachining methods, wet and dry etching techniques, and both laser and ion beam milling methods and their applications in microsensor fabrication.

3. Students can explain the basic structures, physical operation principles, and fabrication processes of main sensor types for different forms of energy.


The principles of microsensors, physical magnitudes which can be measured and manufacturing technologies for microsensors.

Mode of delivery 

Blended teaching (web-based and face-to-face teaching).

Learning activities and teaching methods 

The course will be arranged utilizing activating teaching methods agreed on together with the students. There will be 14 hours of guided teaching events and 118,5 hours of teaching with web-based guidance either privately or in a group.

Target group 

Master students in electronics and communications engineering.

Prerequisites and co-requisites 

Recommended prerequisite is Bachelors degree in Electrical Engineering.

Recommended optional programme components 

The course is an independent entity and does not require additional studies carried out at the same time.

Recommended or required reading 

Will be informed at the beginning of the course.

Assessment methods and criteria 

This course utilizes continuous assessment. The method will be informed at the beginning of the course.


The course utilizes a numerical grading scale 1-5. In the numerical scale zero stands for a fail.

Person responsible 

Jari Hannu

Working life cooperation 


Other information 



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