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Näytä opetus ja tentit
521074S Mikroelektroniikka ja -mekaniikka, 5 op 
Tunniste 521074S  Voimassaolo 01.08.2015 -
Nimi Mikroelektroniikka ja -mekaniikka  Lyhenne Mikroelektronii 
Laajuus5 op   
OpiskelumuotoSyventävät opinnot Oppiaine4306 Sähkötekniikka 
  Arvostelu1 - 5, hyv, hyl 
Vastuuyksikkö Sähkötekniikan ala 

Krisztian Kordas 


5 ECTS cr.




3rd period


Objective: The course provides advanced knowledge on the semiconductor techniques of VLSI and on special topics of micromechanics and hybrid fabrication. Especially recent progress on the field is introduced in application point of view.

Learning outcomes: After completing the course the student can give account on correlations between basic physics/chemistry and materials processing/technology in microelectronics, micromechanics and nanotechnology. The student can describe design aspects and operation principles of micro and nano-devices. The students get acquainted with working in laboratory environment similar to those in academic and industrial research labs. Laboratory work practice on either (i) thin film fabrication in clean room, (ii) inkjet printing and electrical characterization of thin film devices with nanopartciles or (iii) synthesis of carbon nanotubes and characterization by electron microscopy techniques will provide a good opportunity also to learn how to design and run experiments safely and manage laboratory reports.


Theory and practice of VLSI semiconductor fabrication technologies to support and deepen the understanding of general fabrication and operation principles introduced during previous courses. The state-of-the-art semiconductor devices and circuits: pushing the limits of dimensions and speed. Implementation of VLSI technologies in fabrication of components for micromechanics. Sensors (flow, pressure) and actuators (valves, pumps, motors, switches and components for micro-optics) using MEMSs. Devices on the nanoscale and integration of nanomaterials in microsystems: new concepts of design, fabrication and operation.


Lectures, laboratory exercise with supervision and guidance.


Though the course is primarily based on lectures, the communication channel is open in both directions enabling continuous comments, questions and feedback from the students. Critical explanations and think alouds are also applied to motivate thinking and active learning.


Students of the University of Oulu.


Passing the basic course “521070A Introduction to microfabrication techniques” before the advanced course is recommended.

Yhteydet muihin opintojaksoihin 



Lecture notes and references therein.

Suoritustavat ja arviointikriteerit 

Examination and completion of both laboratory exercise and report.

Read more about assessment criteria at the University of Oulu webpage.


Numerical grading 1-5.


Krisztian Kordas






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